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TETRAFLUOROSILANE ICSC: 0576
Date of Peer Review: April 1997

Silicon tetrafluoride
Silicon fluoride
Perfluorosilane
(cylinder)
CAS # 7783-61-1 SiF4
RTECS # VW2327000 Molecular mass: 104.1
UN # 1859
EC Index #
TYPES OF HAZARD / EXPOSURE ACUTE HAZARDS / SYMPTOMS PREVENTION FIRST AID / FIRE FIGHTING
FIRE Not combustible. Gives off irritating or toxic fumes (or gases) in a fire.

NO water. In case of fire in the surroundings: powder, carbon dioxide.
EXPLOSION

In case of fire: cool cylinder by spraying with water but avoid contact of the substance with water.
EXPOSURE
AVOID ALL CONTACT!

Inhalation Sore throat. Cough. Burning sensation. Shortness of breath. Laboured breathing. Symptoms may be delayed (see Notes).
Ventilation, local exhaust, or breathing protection.
Fresh air, rest. Half-upright position. Refer for medical attention.
Skin Redness. ON CONTACT WITH LIQUID: FROSTBITE.
Cold-insulating gloves. Protective clothing.
Rinse skin with plenty of water or shower. Refer for medical attention.
Eyes Redness.
Safety goggles or eye protection in combination with breathing protection.
First rinse with plenty of water for several minutes (remove contact lenses if easily possible), then take to a doctor.
Ingestion


SPILLAGE DISPOSAL PACKAGING & LABELLING
Evacuate danger area! Consult an expert! Ventilation. Personal protection: chemical protection suit including self-contained breathing apparatus.
Do not transport with food and feedstuffs.
EU Classification
UN Classification
UN Hazard Class: 2.3
UN Subsidiary Risks: 8

EMERGENCY RESPONSE STORAGE
Transport Emergency Card: TEC (R)-20G1TC
NFPA Code: H3; F0; R2; W
Fireproof. Keep in a well-ventilated room.
IPCS
International
Programme on
Chemical Safety
Prepared in the context of cooperation between the International Programme on Chemical Safety and the Commission of the European Communities IPCS, CEC 2005

SEE IMPORTANT INFORMATION ON BACK
TETRAFLUOROSILANE ICSC: 0576
IMPORTANT DATA
PHYSICAL STATE; APPEARANCE:
COLOURLESS GAS, WITH PUNGENT ODOUR.

PHYSICAL DANGERS:
The gas is heavier than air.

CHEMICAL DANGERS:
The substance decomposes on heating producing toxic and corrosive fumes including hydrogen fluoride (see ICSC 0283). Reacts with water to form hydrogen fluoride and silicic acid. Attacks many metals in presence of water releasing hydrogen.

OCCUPATIONAL EXPOSURE LIMITS:
TLV: (fluorides, as F) 2.5 mg/m as TWA; A4 (not classifiable as a human carcinogen); BEI issued (ACGIH 2005).
MAK: (Inhalable fraction) 1 mg/m; Peak limitation category: II(4); skin absorption (H); Pregnancy risk group: C; (DFG 2005).
ROUTES OF EXPOSURE:
The substance can be absorbed into the body by inhalation.

INHALATION RISK:
A harmful concentration of this gas in the air will be reached very quickly on loss of containment.

EFFECTS OF SHORT-TERM EXPOSURE:
The substance is corrosive to the eyes, the skin and the respiratory tract. Inhalation of this gas may cause lung oedema (see Notes). The effects may be delayed. Medical observation is indicated.

PHYSICAL PROPERTIES
Sublimation point: -95.7C
Solubility in water: reaction
Relative vapour density (air = 1): 3.6
ENVIRONMENTAL DATA

NOTES
The symptoms of lung oedema often do not become manifest until a few hours have passed and they are aggravated by physical effort. Rest and medical observation is therefore essential. Immediate administration of an appropriate inhalation therapy by a doctor or a person authorized by him/her, should be considered. Card has been partly updated in October 2005. See sections Occupational Exposure Limits, Emergency Response.
ADDITIONAL INFORMATION


LEGAL NOTICE Neither the CEC nor the IPCS nor any person acting on behalf of the CEC or the IPCS is responsible for the use which might be made of this information
IPCS, CEC 2005